|
|
Volumn 5063, Issue , 2003, Pages 505-508
|
|
Laser Cutting of Aluminum Nitride
a
a
Coherent Inc
*
(United States)
|
|
Author keywords
Aluminum nitride; CO2 lasers; Cutting; Substrates
|
|
Indexed keywords
ELECTRONIC CIRCUITS;
INCIDENT ENERGY;
PROCESS SPACE;
ALUMINA;
ALUMINUM NITRIDE;
CARBON DIOXIDE LASERS;
ELECTRIC CONDUCTIVITY;
HEAT SINKS;
MELTING;
NETWORKS (CIRCUITS);
SUBSTRATES;
TOXICITY;
VAPORIZATION;
LASER BEAM CUTTING;
|
|
EID: 2342528503
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.540743 Document Type: Conference Paper |
|
Times cited : (9)
|
|
References (0)
|
