Three-dimensional microoptical components embedded in Foturan glass by a femtosecond laser

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5063, Issue , 2003, Pages 103-107

  Cheng, Y ^a   Sugioka, K ^a,b   Masuda, M ^a,b   Shihoyama, K ^c   Toyoda, K ^b   Midorikawa, K ^a  

^a RIKEN   (Japan)

^b TOKYO UNIVERSITY OF SCIENCE   (Japan)

^c Hoya Photonics Corporation   (Japan)

Author keywords

TAS; Femtosecond laser; Laser micromachining; Microoptical component; Photosensitive glass; Three dimensional

Indexed keywords

ANNEALING; CHEMICAL BONDS; COST EFFECTIVENESS; ETCHING; HELIUM NEON LASERS; HYDROFLUORIC ACID; IRRADIATION; LASER BEAM EFFECTS; LASER PULSES; MICROMACHINING; MIRRORS; OPTICAL BEAM SPLITTERS; OPTICAL WAVEGUIDES; PHOTOSENSITIVE GLASS;

Μ-TAS; FEMTOSECOND LASER; LASER MICROMACHINING; MICROOPTICAL COMPONENT; THREE-DIMENSIONAL;

MICROOPTICS;

EID: 2342514830     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.540697     Document Type: Conference Paper

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