Subsurface properties of ceramics for lightweight mirrors after ELID grinding

JSME International Journal, Series C: Mechanical Systems, Machine Elements and Manufacturing

Volumn 47, Issue 1, 2004, Pages 66-71

  Dai, Yutang ^a   Ohmori, Hitoshi ^a   Watanabe, Yutaka ^a   Eto, Hiroaki ^a   Lin, Weimin ^a   Suzuki, Toru ^a  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

Ceramic; ELID grinding; Lightweight mirror; SiC; Subsurface damage; Zerodur

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; CRACKS; IRON; MIRRORS; POLISHING; SILICON CARBIDE; SURFACE PROPERTIES;

CERAMIC MIRRORS; GRINDING PROCESS PARAMETERS; LIGHTWEIGHT MIRRORS;

CERAMIC MATERIALS;

CERAMIC COATING; DAMAGE; GRINDING; SURFACE ROUGHNESS;

EID: 2342498234     PISSN: 13447653     EISSN: None     Source Type: Journal    
DOI: 10.1299/jsmec.47.66     Document Type: Article

References (8)

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