Spectroscopic characterization of low power argon microwave induced plasma

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 59, Issue 4, 2004, Pages 419-428

  Holclajtner Antunovic I ^a   Raskovic M ^a   Jovicevic S ^b  

^a Faculty of Physical Chemistry   (Serbia)

^b UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

Beenakker resonant cavity; Ionization temperature; Microwave induced plasma; Non equilibrium factor; Spatial distribution of emission

Indexed keywords

ARGON; CARRIER CONCENTRATION; DISSOCIATION; HYDRIDES; IONIZATION; MASS SPECTROMETRY; MICROWAVES; RADIATION EFFECTS; SPECTROSCOPIC ANALYSIS;

BENAKKER RESONANT CAVITY; IONIZATION TEMPERATURE; MICROWAVE INDUCED PLASMA; NON-EQUILIBRIUM FACTORS; SPATIAL DISTRIBUTION OF EMISSION;

LASER PRODUCED PLASMAS;

EID: 2342496787     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2003.12.020     Document Type: Conference Paper

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