Surface nanopatterning of metal thin films by physical vapour deposition onto surface-modified silicon nanodots

Nanotechnology

Volumn 15, Issue 4, 2004, Pages

  Azzaroni, O ^a   Fonticelli, M ^a   Schilardi, P L ^a   Benitez G ^a   Caretti, I ^b   Albella, J M ^b   Gago, R ^c   Vazquez L ^b   Salvarezza, R C ^a  

^a INSTITUTO DE INVESTIGACIONES FISICOQUÍMICAS TEÓRICAS Y APLICADAS INIFTA   (Argentina)

^b INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

^c INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BIOSENSORS; CATALYSIS; DATA STORAGE EQUIPMENT; ELECTROMAGNETISM; LITHOGRAPHY; METALLIC FILMS; PHYSICAL VAPOR DEPOSITION; POROUS MATERIALS; SELF ASSEMBLY; SPUTTERING; SURFACE TREATMENT;

ELECTROCATALYSIS; METAL FILM DEPOSITION; SILICON NANODOTS; SURFACE NANOPATTERNING;

THIN FILMS;

EID: 2342472074     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/15/4/014     Document Type: Conference Paper

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