UV-laser-assisted fabrication of dispersive structures in polymeric integrated-optical components

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5063, Issue , 2003, Pages 482-487

  Wochnowski, Carsten ^a   Metev, Simeon ^a   Meteva, Krassimira ^a   Vollertsen, Frank ^a  

^a BIAS BREMER INSTITUT FÜR ANGEWANDTE STRAHLTECHNIK GMBH   (Germany)

Author keywords

Bragg structure; Phase mask method; PMMA; Polymer integrated optics; Surface relief grating; Surface topography

Indexed keywords

DIFFRACTION GRATINGS; FABRICATION; MASKS; MICROPROCESSOR CHIPS; OPTICAL COMMUNICATION; OPTICAL SENSORS; OPTICAL WAVEGUIDES; POLYMETHYL METHACRYLATES; SURFACE TOPOGRAPHY;

PHASE MASK METHODS; POLYMERIC INTEGRATED-OPTICAL COMPONENTS; SURFACE RELIEF GRATINGS;

INTEGRATED OPTICS;

EID: 2342455811     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.540767     Document Type: Conference Paper

References (22)

1. A. Othonos, K. Kalli, Fiber Bragg Gratings, Artech House, Boston, London (1999) 154
2. R. Kashyap, Fiber Bragg Gratings, Academic Press, San Diego (1999) 57
3. S. Juma, OptoLaser Europe (Oct. 1996) 25
4. D. Gillett, D. Basting, FibreSystems (Dec. 1998) 19
5. E. Mayer, D. Basting, Laser-Focus World (Apr. 2000) 107
6. S. Küper, M. Stuke, Appl. Phys. A 49 (1989) 211
7. S. Küper, dissertation work, Univ. Göttingen (1989) 15-23
8. W. Frank et al., Noncond. Photopolym. Appl., SPIE Vol. 1774 (1992) 267
9. W. Frank et al., Polym. in Optics. ed. by R.A. Lessard, W. Frank, SPIE Vol. CR63 (1996) 65
10. C. Wochnowski, S. Metev, G. Sepold, Appl. Surf. Sc. 154-155 (2000) 706
11. P.E. Dyer, R.J. Parley, R. Giedl, Opt. Commun. 115 (1995) 327
12. C. Wochnowski, S. Metev, K. Meteva, Proc. LPM 2002, SPIE Vol. 4830, Japan
13. J.A. Moore, J.O. Choi in Radiation Effects on Polymers ed. by R.L. Clough, S.W. Shalaby American Chemical Society (1991) 158
14. M. Dole in Radiation Chemistry of Macromol., Vol II, Acad. Press NY, London (1973)
15. P. Hess, Highlights LambdaPhysik 42 (Nov 1993) 1
16. S. Metev, V. Veiko, Laser-assisted Microtechnology, Springer Press (1998) 37
17. G. Welder, Lehrbuch Phys. Chem. VCH-Verlag (1987) 168
18. R. Braun, P. Hess, J. Chem. Phys. 99(10) (Nov 1993) 8330
19. K. Domen, T.J. Chuang, J. Chem. Phys. 90 (6) (Mar 1989) 3318
20. K. Domen, T. J. Chuang, J. Chem. Phys. 90 (6) (Mar 1989) 3332
21. IBSEN manufacturing brochure
22. P.E. Dyer, R.J. Farley, R. Giedl et al., Appl. Phys. Lett. 64(25) (Jun 1994) 3389