Preparation and characterization of SiO2 films with different techniques

Journal of Electronic Materials

Volumn 27, Issue 12, 1998, Pages 1347-1350

  Xuping, Zhang ^a   Qing, Li ^a   Haokang, Zhang ^a  

^a SOUTHEAST UNIVERSITY   (China)

Author keywords

Radio frequency (rf) magnetron sputtering; SiO2 film; Sol gel

Indexed keywords

ATOMIC FORCE MICROSCOPY; FILM PREPARATION; MAGNETRON SPUTTERING; MORPHOLOGY; REFRACTIVE INDEX; SILICA; SOL-GELS;

RADIO FREQUENCY MAGNETRON SPUTTERING;

SEMICONDUCTING FILMS;

EID: 2342429523     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-998-0095-2     Document Type: Article

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