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Volumn 44, Issue 21, 2005, Pages 4547-4556

Rod and spherical silica microlenses fabricated by CO2 laser melting

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE; IMAGE PROCESSING; LASERS; MELTING; OPTICAL FIBERS; PHOTORESISTS; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICA;

EID: 23344451705     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.44.004547     Document Type: Article
Times cited : (19)

References (30)
  • 3
    • 84975664464 scopus 로고
    • Technique for the monolithic fabrication of microlens array
    • Z. D. Popovic, R. A. Sprage, and G. A. Neville-Connell, "Technique for the monolithic fabrication of microlens array," Appl. Opt. 27, 1281-1284 (1984).
    • (1984) Appl. Opt. , vol.27 , pp. 1281-1284
    • Popovic, Z.D.1    Sprage, R.A.2    Neville-Connell, G.A.3
  • 4
    • 0035760019 scopus 로고    scopus 로고
    • Fabrication of glass lenses by the melting technology
    • Lithographic and Micromachining Techniques for Optical Component Fabrication, E.-B. Kley and H. P. Herzig, eds.
    • E.-B. Kley, H. J. Fuchs, and A. Kilian, "Fabrication of glass lenses by the melting technology," in Lithographic and Micromachining Techniques for Optical Component Fabrication, E.-B. Kley and H. P. Herzig, eds., Proc. SPIE 4440, 85-92 (2001).
    • (2001) Proc. SPIE , vol.4440 , pp. 85-92
    • Kley, E.-B.1    Fuchs, H.J.2    Kilian, A.3
  • 6
    • 0000334736 scopus 로고    scopus 로고
    • Mid-infrared microlenses fabricated by the melting method
    • S. Calixto and M. Ornelas-Rodriguez, "Mid-infrared microlenses fabricated by the melting method," Opt. Lett. 24, 1212-1214 (1999).
    • (1999) Opt. Lett. , vol.24 , pp. 1212-1214
    • Calixto, S.1    Ornelas-Rodriguez, M.2
  • 7
    • 0036603118 scopus 로고    scopus 로고
    • Silicone microlenses and interference gratings
    • S. Calixto, "Silicone microlenses and interference gratings," Appl. Opt. 41, 3355-3361 (2002).
    • (2002) Appl. Opt. , vol.41 , pp. 3355-3361
    • Calixto, S.1
  • 8
    • 0001640493 scopus 로고    scopus 로고
    • Characterization of a polymer microlens fabricated by use of the hydrophobic effect
    • D. M. Hartmann, O. Kibar, and S. C. Esener, "Characterization of a polymer microlens fabricated by use of the hydrophobic effect," Opt. Lett. 25, 975-977 (2000).
    • (2000) Opt. Lett. , vol.25 , pp. 975-977
    • Hartmann, D.M.1    Kibar, O.2    Esener, S.C.3
  • 9
    • 0038277023 scopus 로고    scopus 로고
    • Laser application for optical glass polishing
    • F. Vega, N. Lupon, J. A. Cebrian, and F. Laguarta, "Laser application for optical glass polishing," Opt. Eng. 37, 272-279 (1998).
    • (1998) Opt. Eng. , vol.37 , pp. 272-279
    • Vega, F.1    Lupon, N.2    Cebrian, J.A.3    Laguarta, F.4
  • 10
    • 0345045432 scopus 로고    scopus 로고
    • Laser heat treatment driven by integrated beams: Role of irradiation nonuniformities
    • J. L. Ocana, A. Garcia-Beltran, F. Laguarta, J. Armengol, N. Lupon, and F. Vega, "Laser heat treatment driven by integrated beams: role of irradiation nonuniformities," Appl. Opt. 38, 4570-4576 (1999).
    • (1999) Appl. Opt. , vol.38 , pp. 4570-4576
    • Ocana, J.L.1    Garcia-Beltran, A.2    Laguarta, F.3    Armengol, J.4    Lupon, N.5    Vega, F.6
  • 11
    • 0035454263 scopus 로고    scopus 로고
    • Laser polishing of optical fiber end surface
    • M. Udrea, H. Orun, and A. Alacakir, "Laser polishing of optical fiber end surface," Opt. Eng. 40, 2026-2030 (2001).
    • (2001) Opt. Eng. , vol.40 , pp. 2026-2030
    • Udrea, M.1    Orun, H.2    Alacakir, A.3
  • 12
    • 0026374734 scopus 로고
    • Laser ablation of refractive micro-optic lenslet arrays
    • Miniature and Micro-Optics: Fabrication and System Applications, C. Roychoudhuri and W. B. Veldkamp, eds.
    • J. Bartley and W. Goltsos, "Laser ablation of refractive micro-optic lenslet arrays," in Miniature and Micro-Optics: Fabrication and System Applications, C. Roychoudhuri and W. B. Veldkamp, eds., Proc. SPIE 1544, 140-145 (1991).
    • (1991) Proc. SPIE , vol.1544 , pp. 140-145
    • Bartley, J.1    Goltsos, W.2
  • 14
    • 0026399651 scopus 로고
    • Laser heating and evaporation of glass and glass burning materials and its application for creating MOC
    • Miniature and Micro-Optics: Fabrication and System Applications, C. Roychoudhuri and W. B. Veldkamp, eds.
    • V. P. Veiko, E. B. Yaklovev, V. V. Frolov, V. A. Chujko, A. K. Kromi, M. O. Abbakumov, A. T. Shakola, and P. A. Fomichov, "Laser heating and evaporation of glass and glass burning materials and its application for creating MOC," in Miniature and Micro-Optics: Fabrication and System Applications, C. Roychoudhuri and W. B. Veldkamp, eds., Proc. SPIE 1544, 152-163 (1991).
    • (1991) Proc. SPIE , vol.1544 , pp. 152-163
    • Veiko, V.P.1    Yaklovev, E.B.2    Frolov, V.V.3    Chujko, V.A.4    Kromi, A.K.5    Abbakumov, M.O.6    Shakola, A.T.7    Fomichov, P.A.8
  • 15
    • 84920170078 scopus 로고
    • Laser fabrication of MOC based on soft laser heating of glass and glass like materials
    • Miniature Micro-Optics and Micromechanics, N. C. Gallagher and C. Roychoudhuri, eds.
    • P. Veiko, A. K. Kromin, and E. B. Yakovlev, "Laser fabrication of MOC based on soft laser heating of glass and glass like materials," in Miniature Micro-Optics and Micromechanics, N. C. Gallagher and C. Roychoudhuri, eds., Proc. SPIE 1992, 159-167 (1993).
    • (1993) Proc. SPIE , vol.1992 , pp. 159-167
    • Veiko, P.1    Kromin, A.K.2    Yakovlev, E.B.3
  • 16
    • 65749085512 scopus 로고
    • Laser technologies for miniature optical elements: Approach and solutions
    • Miniature Micro-Optics and Micromechanics, N. C. Gallagher and C. Roychoudhuri, eds.
    • V. P. Veiko, V. A. Chuiko, P. A. Fomichev, G. K. Kostyuk, A. K. Kromin, A. T. Shakola, and E. B. Yakovlev, "Laser technologies for miniature optical elements: approach and solutions," in Miniature Micro-Optics and Micromechanics, N. C. Gallagher and C. Roychoudhuri, eds., Proc. SPIE 1992, 114-127 (1993).
    • (1993) Proc. SPIE , vol.1992 , pp. 114-127
    • Veiko, V.P.1    Chuiko, V.A.2    Fomichev, P.A.3    Kostyuk, G.K.4    Kromin, A.K.5    Shakola, A.T.6    Yakovlev, E.B.7
  • 17
    • 0038200676 scopus 로고
    • Physical fundamentals of laser forming of micro-optical components
    • P. Veiko and Y. B. Yaklovlev, "Physical fundamentals of laser forming of micro-optical components," Opt. Eng. 33, 3567-3571 (1994).
    • (1994) Opt. Eng. , vol.33 , pp. 3567-3571
    • Veiko, P.1    Yaklovlev, Y.B.2
  • 18
    • 0345724858 scopus 로고    scopus 로고
    • Optical interconnections optimization based on a classical approach
    • Photon Processing in Microelectronics and Photonics II, A. Pique et al., eds.
    • V. P. Veiko, N. B. Voznesensky, A. Petrov, V. F. Pashin, N. N. Voznesenskaya, S. M. Metev, and C. Wochnowski, "Optical interconnections optimization based on a classical approach," in Photon Processing in Microelectronics and Photonics II, A. Pique et al., eds., Proc. SPIE 4977, 569-577 (2003).
    • (2003) Proc. SPIE , vol.4977 , pp. 569-577
    • Veiko, V.P.1    Voznesensky, N.B.2    Petrov, A.3    Pashin, V.F.4    Voznesenskaya, N.N.5    Metev, S.M.6    Wochnowski, C.7
  • 19
    • 84894002921 scopus 로고    scopus 로고
    • Ref. 1, p. 132
    • Ref. 1, p. 132.
  • 21
    • 0021512947 scopus 로고
    • Lens-ended fibers for medical applications: A new fabrication technique
    • V. Russo, G. C. Righini, S. Sottini, and S. Trigari, "Lens-ended fibers for medical applications: a new fabrication technique," Appl. Opt. 23, 3277-3283 (1984).
    • (1984) Appl. Opt. , vol.23 , pp. 3277-3283
    • Russo, V.1    Righini, G.C.2    Sottini, S.3    Trigari, S.4
  • 22
    • 84894004849 scopus 로고    scopus 로고
    • Schott Glass Technologies, http://www.us.schott.coin/balllens.
  • 23
    • 84894000190 scopus 로고    scopus 로고
    • Edmund Industrial Optics, 101 East Gloucester Pike, Barrington, N.J. 08007
    • Edmund Industrial Optics, 101 East Gloucester Pike, Barrington, N.J. 08007.
  • 24
    • 0029267575 scopus 로고
    • Parameter control, characterization, and optimization in the fabrication of optical fiber near-field probes
    • G. A. Valaskovic, M. Holton, and G. H. Morrison, "Parameter control, characterization, and optimization in the fabrication of optical fiber near-field probes," Appl. Opt. 34, 1215-1228 (1995).
    • (1995) Appl. Opt. , vol.34 , pp. 1215-1228
    • Valaskovic, G.A.1    Holton, M.2    Morrison, G.H.3
  • 26
    • 84894000448 scopus 로고
    • "Improvements in or relating to optical systems," British patent 954,629 (8 April)
    • H. H. Hopkins, "Improvements in or relating to optical systems," British patent 954,629 (8 April 1964).
    • (1964)
    • Hopkins, H.H.1
  • 27
    • 0031274198 scopus 로고    scopus 로고
    • Design, fabrication and testing of microlenses arrays for sensors and microsystems
    • Ph. Nussbaum, R. Volkel, H. P. Herzig, M. Eisner, and S. Haselbeck, "Design, fabrication and testing of microlenses arrays for sensors and microsystems," Pure Appl. Opt. 6, 617-636 (1997).
    • (1997) Pure Appl. Opt. , vol.6 , pp. 617-636
    • Nussbaum, Ph.1    Volkel, R.2    Herzig, H.P.3    Eisner, M.4    Haselbeck, S.5
  • 28
    • 0041322203 scopus 로고    scopus 로고
    • Modulation transfer function measurements of microjetted microlenses
    • B. T. Teipen and D. C. MacFarlane, "Modulation transfer function measurements of microjetted microlenses," Appl. Opt. 38, 2040-2046 (1999).
    • (1999) Appl. Opt. , vol.38 , pp. 2040-2046
    • Teipen, B.T.1    MacFarlane, D.C.2
  • 29
    • 0027201388 scopus 로고
    • Effect of refractive microlens array fabrication parameters on optical quality
    • Miniature and Micro-Optics: Fabrication and System Applications II, C. Roychoudhuri and W. B. Veldkamp, eds.
    • T. R. Jay, M. B. Stern, and R. E. Knowlden, "Effect of refractive microlens array fabrication parameters on optical quality," in Miniature and Micro-Optics: Fabrication and System Applications II, C. Roychoudhuri and W. B. Veldkamp, eds., Proc. SPIE 1751, 236-245 (1992).
    • (1992) Proc. SPIE , vol.1751 , pp. 236-245
    • Jay, T.R.1    Stern, M.B.2    Knowlden, R.E.3
  • 30
    • 0035388154 scopus 로고    scopus 로고
    • Low numerical aperture refractive microlenses in fused silica
    • Ph. Nussbaum and H. P. Herzig, "Low numerical aperture refractive microlenses in fused silica," Opt. Eng. 40, 1412-1414 (2001).
    • (2001) Opt. Eng. , vol.40 , pp. 1412-1414
    • Nussbaum, Ph.1    Herzig, H.P.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.