Two-dimensional optical storage mastering: Adding a new dimension to liquid immersion mastering

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 5 B, 2005, Pages 3583-3586

  Boamfa, Marius I ^a   Neijzen, Jaap H M ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Digital lithography; Liquid immersion mastering; Mastering; TwoDOS

Indexed keywords

DENSITY (OPTICAL); LITHOGRAPHY; OPTICAL DEVICES; OPTICAL RECORDING; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR LASERS; SIGNAL PROCESSING; SYNCHRONIZATION; WAVEFORM ANALYSIS;

DIGITAL LITHOGRAPHY; LIQUID IMMERSION MASTERING; MASTERING; TWODOS;

OPTICAL DATA STORAGE;

EID: 23144461223     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.3583     Document Type: Conference Paper

References (7)

1. A. van der Lee, D. Bruls, C. Busch, A. Immink, W. Coene and A. Hekstra: Jpn. J. Appl. Phys. 43 (2004) 4912.
2. A data density compatible with the present optical storage developments can only be achieved using a blue or shorter wavelength laser.
3. M. Takeda, M. Furuki, M, Yamamoto, M. Shinoda, K. Saito, Y. Aki and H. Kawase: International Symposium on Optical Memory 2003, Tech. Dig., p. 248.
4. Philips Optical Data Technology Centre Eindhoven within the frame of the TwoDOS European research project.
5. H. van Santen and J. H. M. Neijzen: Jpn. J. Appl. Phys. 42 (2003) 1110.
6. J. H. M. Neijzen, E. R. Meinders and H. van Santen: Jpn. J. Appl. Phys. 43 (2004) 5047.
7. For a given lattice constant (LC) the track pitch (TP) is given by TP = tan(60°) · LC/2 and the pit to pit distance is equal to the LC.