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Volumn 489, Issue 1-2, 2005, Pages 177-180
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Stress-impedance effects in multilayered FeSiB/Cu/FeSiB films
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Author keywords
Magnetron sputtering; Meander structure; Multilayered FeSiB Cu FeSiB films; Stress impedance
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Indexed keywords
IRON COMPOUNDS;
MAGNETRON SPUTTERING;
MOLECULAR STRUCTURE;
MULTILAYERS;
NATURAL FREQUENCIES;
STRESS ANALYSIS;
FREQUENCY RANGE;
MEANDER STRUCTURES;
MULTILAYER FESIB/CU/FESIB FILMS;
STRESS-IMPEDENCE;
THIN FILMS;
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EID: 23144432848
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2005.04.077 Document Type: Article |
Times cited : (8)
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References (15)
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