Plasma oxidation as a tool to design oxide films at low temperatures

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 19, Issue 4, 2001, Pages 1965-1970

  Schennach, R ^a,b,c   Grady, T ^d   Naugle, D G ^b   Parga, J R ^a   Mcwhinney, H ^d   Cocke, D L ^a  

^a LAMAR UNIVERSITY   (United States)

^b TEXAS A AND M UNIVERSITY   (United States)

^c Prairie View A&M University ^*

^d PRAIRIE VIEW A AND M UNIVERSITY   (United States)

Author keywords

(Cu,Zr)

Indexed keywords

EID: 23044525701     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.1380718     Document Type: Conference Paper

References (18)

1. P. Sen, D. D. Sarma, R. C. Budhani, K. L. Chopra, and C. N. R. Rao, J. Phys. F: Met. Phys. JPFMAT 14, 565 (1984).JPFMAT
2. B. Cox and Y. M. Wong, J. Nucl. Mater. JNUMAM 218, 324 (1995).JNUMAM
3. K. Hono, T. Iwata, M. Nakamura, H. W. Pickering, I. Kamiya, and T. Sakurai, Surf. Sci. SUSCAS 245, 132 (1991).SUSCAS
4. C. M. Chan, S. Trigwell, and T. Duerig, Surf. Interface Anal. SIANDQ 15, 349 (1990).SIANDQ
5. D. L. Cocke, M. S. Owens, and R. B. Wright, Appl. Surf. Sci. ASUSEE 31, 341 (1988).ASUSEE
6. D. L. Cocke, G. Liang, M. Owens, D. E. Halverson, and D. G. Naugle, Mater. Sci. Eng. MSCEAA 99, 497 (1988).MSCEAA
7. C. Yoon and D. L. Cocke, Appl. Surf. Sci. ASUSEE 31, 118 (1988).ASUSEE
8. T. Mebrahtu, T. R. Hess, D. E. Mencer, K. G. Balke, D. G. Naugle, and D. L. Cocke, Mater. Sci. Eng., A MSAPE3 134, 1041 (1991).MSAPE3
9. D. L. Cocke, D. G. Naugle, and R. Schennach, in Surface Engineering: In Materials Science I, edited by S. Seal, N. B. Dahotre, J. J. Moore, and B. Mishra (Minerals, Metals, & Materials Society, Warrendale, PA, 2000), 23.
10. D. L. Cocke, S. Promreuk, R. Schennach, M. Y. Mollah, and D. G. Naugle, Mater. Res. Soc. Symp. Proc. MRSPDH 574, 125 (1999).MRSPDH
11. D. L. Cocke, T. R. Hess, T. Mebrahtu, D. E. Mencer, and D. G. Naugle, Solid State Ionics SSIOD3 43, 119 (1990).SSIOD3
12. M. Y. A. Mollah, R. Schennach, J. Patscheider, S. Promreuk, and D. L. Cocke, J. Haz. Mat. (in press).
13. T. B. B. Massalski, Binary Alloy Phase Diagrams, 2nd ed. (ASM International, 1990), Vol. 2.
14. D. L. Cocke and co-workers (unpublished).
15. Y. S. Li, P. C. Wong, and K. A. R. Mitchell, Appl. Surf. Sci. ASUSEE 89, 263 (1995).ASUSEE
16. C. D. Wagner, W. M. Riggs, L. E. Davis, and J. F. Moulder, in Handbook of X-Ray Photoelectron Spectroscopy, edited by G. E. Muilenberg (Perkin Elmer, Eden Prairie, MN, 1979).
17. R. Schennach, S. Promreuk, D. G. Naugle, and D. L. Cocke, Oxid. Met. (in press).
18. N. Bellakhal, K. Draou, and J. L. Brisset, J. Appl. Electrochem. JAELBJ 27, 414 (1997).JAELBJ