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Volumn 329-333, Issue II, 2003, Pages 1529-1530
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Electronic properties of super-hard carbon nanocrystallite film
b
NTT CORPORATION
(Japan)
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Author keywords
Carbon films; Diamond like carbon; Electron cyclotron resonance sputtering
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Indexed keywords
CARBON;
CYCLOTRONS;
DIAMONDS;
ELECTRIC CONDUCTIVITY;
ELECTRONS;
NANOSTRUCTURED MATERIALS;
SPUTTERING;
THERMAL EFFECTS;
CARBON FILMS;
DIAMOND-LIKE CARBON;
ELECTRON CYCLOTRON RESONANCE SPUTTERING;
ROOM TEMPERATURE;
THIN FILMS;
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EID: 23044450956
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-4526(02)02273-1 Document Type: Conference Paper |
Times cited : (4)
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References (6)
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