Characterization of buried photonic crystal waveguides and microcavities fabricated by deep ultraviolet lithography

Journal of Applied Physics

Volumn 98, Issue 1, 2005, Pages

  Märki, Iwan ^a   Salt, Martin ^a   Herzig, Hans Peter ^a   Stanley, Ross ^b   El Melhaoui, L ^c   Lyan, P ^c   Fedeli, J M ^c  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b CSEM   (Switzerland)

^c CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL CIRCUITS; PHOTONIC CRYSTAL WAVEGUIDES; RESONANT MICROCAVITIES; TRANSMISSION SPECTRA;

COMPUTER SIMULATION; CRYSTALLINE MATERIALS; PHOTOLITHOGRAPHY; PHOTONS; SILICA; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; ULTRAVIOLET RADIATION;

OPTICAL WAVEGUIDES;

EID: 22944453090     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1948507     Document Type: Article

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