메뉴 건너뛰기




Volumn 166, Issue 1, 2005, Pages 30-43

Effects of welding on the passive oxide film of electropolished 316L stainless steel

Author keywords

Auger electron spectroscopy; Electropolished 316L stainless steel; Heat affected zone

Indexed keywords

ARGON; AUGER ELECTRON SPECTROSCOPY; COMPOSITION; CORROSIVE EFFECTS; HEAT AFFECTED ZONE; SEMICONDUCTOR MATERIALS; STAINLESS STEEL; WELDING;

EID: 22944446404     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2004.07.091     Document Type: Article
Times cited : (23)

References (36)
  • 2
    • 0028499803 scopus 로고
    • How gas panels affect contamination
    • H. Kobayashi How gas panels affect contamination Semicond. Int. 1994 81 85
    • (1994) Semicond. Int. , pp. 81-85
    • Kobayashi, H.1
  • 3
    • 22944441766 scopus 로고    scopus 로고
    • Orbital welding of 316L stainless steel tubing
    • B.K. Henon Orbital welding of 316L stainless steel tubing The Fabricator 1997
    • (1997) The Fabricator
    • Henon, B.K.1
  • 4
    • 17444447563 scopus 로고
    • The welding metallurgy of stainless steel
    • R. Fenn The welding metallurgy of stainless steel Weld. Met. Fabr. 55 7 1987 382 386
    • (1987) Weld. Met. Fabr. , vol.55 , Issue.7 , pp. 382-386
    • Fenn, R.1
  • 5
    • 22944445913 scopus 로고
    • Beyond class 1 clean rooms: Particle contamination detection in ultra clean environments
    • H.T. Sommer Beyond class 1 clean rooms: particle contamination detection in ultra clean environments Microcontamination Conf. Proc. 1991 1 8
    • (1991) Microcontamination Conf. Proc. , pp. 1-8
    • Sommer, H.T.1
  • 7
    • 0027594530 scopus 로고
    • Using all-stainless steel filters in hydrogen chloride gas lines: An investigation of contamination effects
    • W. Plante, J. Jaillet, and R. Tawfik Using all-stainless steel filters in hydrogen chloride gas lines: an investigation of contamination effects Microcontamination Conf. Proc. 1993 29 77
    • (1993) Microcontamination Conf. Proc. , pp. 29-77
    • Plante, W.1    Jaillet, J.2    Tawfik, R.3
  • 8
    • 2642552215 scopus 로고
    • SEMASPEC test method for XPS analysis of surface composition and chemistry of electropolished stainless steel tubing for gas distribution system components
    • February
    • SEMASPEC test method for XPS analysis of surface composition and chemistry of electropolished stainless steel tubing for gas distribution system components, SEMATECH technology transfer #90120403B-STD, February 1993. http://ismi.sematech.org/standards/semaspecs.htm.
    • (1993) SEMATECH Technology Transfer #90120403B-STD
  • 9
    • 22944466810 scopus 로고
    • SEMASPEC test method for AES analysis of surface and oxide composition of electropolished stainless steel tubing for gas distribution system components
    • February
    • SEMASPEC test method for AES analysis of surface and oxide composition of electropolished stainless steel tubing for gas distribution system components, SEMATECH transfer technology #91060573B-STD, February 1993. http://ismi. sematech.org/standards/semaspecs.htm.
    • (1993) SEMATECH Transfer Technology #91060573B-STD
  • 10
    • 0018997890 scopus 로고
    • Surface composition of a type 316 stainless steel related to initiation of crevice corrosion
    • G. Hulquist, and C. Leygraf Surface composition of a type 316 stainless steel related to initiation of crevice corrosion Corrosion 36 3 1980 126 129
    • (1980) Corrosion , vol.36 , Issue.3 , pp. 126-129
    • Hulquist, G.1    Leygraf, C.2
  • 11
    • 0019079139 scopus 로고
    • Mechanism of intergranular corrosion of 316L stainless steel in oxidizing acids
    • T.M. Devine, C.L. Briant, and B.J. Drummond Mechanism of intergranular corrosion of 316L stainless steel in oxidizing acids Scr. Metall. 14 11 1980 1175 1179
    • (1980) Scr. Metall. , vol.14 , Issue.11 , pp. 1175-1179
    • Devine, T.M.1    Briant, C.L.2    Drummond, B.J.3
  • 13
    • 22944479131 scopus 로고
    • Oxygen passivation of stainless steel for advanced semiconductor manufacturing
    • #SKT9006E, Kobe Steel, Ltd., Tokyo, Japan
    • H. Hamada, T. Ohmi, Y. Nakahara, Oxygen passivation of stainless steel for advanced semiconductor manufacturing, Technical Document, #SKT9006E, Kobe Steel, Ltd., Tokyo, Japan, 1990.
    • (1990) Technical Document
    • Hamada, H.1    Ohmi, T.2    Nakahara, Y.3
  • 14
    • 0018152551 scopus 로고
    • Detecting susceptibility to intergranular corrosion of stainless steel weld heat-affected zones
    • R.F. Steigerwald ASTM Technical Publication
    • B. Vyas, and H.S. Isaacs Detecting susceptibility to intergranular corrosion of stainless steel weld heat-affected zones R.F. Steigerwald Intergranular corrosion of stainless alloys 656 1977 ASTM Technical Publication 133 145
    • (1977) Intergranular Corrosion of Stainless Alloys , vol.656 , pp. 133-145
    • Vyas, B.1    Isaacs, H.S.2
  • 16
    • 0026932265 scopus 로고
    • Relationship between grain boundary structure and intergranular corrosion in heat-affected zone of type 304 stainless steel
    • H. Kokawa, and T. Kuwana Relationship between grain boundary structure and intergranular corrosion in heat-affected zone of type 304 stainless steel Trans, Jpn. Weld. Soc. 23 2 1992 11 19
    • (1992) Trans, Jpn. Weld. Soc. , vol.23 , Issue.2 , pp. 11-19
    • Kokawa, H.1    Kuwana, T.2
  • 17
    • 0015404727 scopus 로고
    • Chemistry of grain boundaries and its relation to intergranular corrosion of austenitic stainless steels
    • A. Joshi, and D.F. Stein Chemistry of grain boundaries and its relation to intergranular corrosion of austenitic stainless steels Corrosion-NACE 28 9 1972 321 329
    • (1972) Corrosion-NACE , vol.28 , Issue.9 , pp. 321-329
    • Joshi, A.1    Stein, D.F.2
  • 18
    • 22944485152 scopus 로고
    • Examination of the heat-affected zone by Auger electron spectroscopy
    • V. Pilous, R. Kovarik, and M. Koutnik Examination of the heat-affected zone by Auger electron spectroscopy Weld. Int. 1 1989 76 81
    • (1989) Weld. Int. , vol.1 , pp. 76-81
    • Pilous, V.1    Kovarik, R.2    Koutnik, M.3
  • 20
    • 1842387473 scopus 로고
    • Influence of weld discoloration on the susceptibility of stainless steel weldments to microbiologically influenced corrosion
    • A. Punter Influence of weld discoloration on the susceptibility of stainless steel weldments to microbiologically influenced corrosion Stainl. Steel Eur. 6 8 1994 38 43
    • (1994) Stainl. Steel Eur. , vol.6 , Issue.8 , pp. 38-43
    • Punter, A.1
  • 21
    • 22944451620 scopus 로고
    • Material and technical considerations for orbital welding in ultra-high-purity applications
    • B.K. Henon, and A. Jekel Material and technical considerations for orbital welding in ultra-high-purity applications Microcontamination Conf. Proc. 1989 260 284
    • (1989) Microcontamination Conf. Proc. , pp. 260-284
    • Henon, B.K.1    Jekel, A.2
  • 22
    • 0031021026 scopus 로고    scopus 로고
    • Effects of purge gas purity and chelant passivation on the corrosion resistance of orbitally welded 316L stainless steel tubing
    • A. Grant, B.K. Henon, and F. Mansfeld Effects of purge gas purity and chelant passivation on the corrosion resistance of orbitally welded 316L stainless steel tubing Pharm. Eng. 17 1 1997 1 22
    • (1997) Pharm. Eng. , vol.17 , Issue.1 , pp. 1-22
    • Grant, A.1    Henon, B.K.2    Mansfeld, F.3
  • 23
    • 18544404982 scopus 로고
    • The effects of minor elements on the welding characteristics of stainless steel
    • B. Pollard The effects of minor elements on the welding characteristics of stainless steel Weld. J. 67 9 1988 202 205
    • (1988) Weld. J. , vol.67 , Issue.9 , pp. 202-205
    • Pollard, B.1
  • 24
    • 0022726312 scopus 로고
    • Interaction between impurities and welding variables in determining GTA weld shape
    • P. Burgardt, and C.R. Heiple Interaction between impurities and welding variables in determining GTA weld shape Weld. J. 63 6 1986 150 155
    • (1986) Weld. J. , vol.63 , Issue.6 , pp. 150-155
    • Burgardt, P.1    Heiple, C.R.2
  • 25
    • 22944478791 scopus 로고
    • The effect of chemical composition on weld penetration behavior in austenitic stainless steels
    • G. Carboni The effect of chemical composition on weld penetration behavior in austenitic stainless steels Weld. Int. 8 1987 750 755
    • (1987) Weld. Int. , vol.8 , pp. 750-755
    • Carboni, G.1
  • 27
    • 22944433314 scopus 로고
    • Basics of corrosion measurements
    • EG&G Princeton Applied Research, Basics of Corrosion Measurements, Application Note CORR 1, (1982).
    • (1982) Application Note CORR , vol.1
  • 29
    • 25144518663 scopus 로고
    • Certificate of analysis
    • Stainless Steel AISI 316 NIST, Washington, DC
    • Certificate of Analysis, Standard Reference Material 1155, Stainless Steel AISI 316 NIST, Washington, DC, 1969.
    • (1969) Standard Reference Material , vol.1155
  • 34
    • 0001600142 scopus 로고
    • Cooling rates and peak temperature in fusion welding
    • C.M. Adams Cooling rates and peak temperature in fusion welding Weld J. 37 5 1958 210 215
    • (1958) Weld J. , vol.37 , Issue.5 , pp. 210-215
    • Adams, C.M.1
  • 36
    • 0016358094 scopus 로고
    • Composition-depth profiles obtained with Auger electron spectroscopy of air-oxidized stainless steel surfaces
    • G. Betz, G.K. Wehner, and L. Toth Composition-depth profiles obtained with Auger electron spectroscopy of air-oxidized stainless steel surfaces J. App. Phys. 45 12 1974 5312 5316
    • (1974) J. App. Phys. , vol.45 , Issue.12 , pp. 5312-5316
    • Betz, G.1    Wehner, G.K.2    Toth, L.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.