A novel integrated acoustic gas and temperature sensor

IEEE Sensors Journal

Volumn 2, Issue 4, 2002, Pages 301-306

  Sternhagen, Jason D ^b   Wold, Cyle E ^c   Kempf, Wade A ^b   Karlgaard, Matt ^b   Mitzner, Kraig D ^b   Mileham, Russell D ^c   Galipeau, David W ^a,b  

^a IEEE

^b South Dakota State University   (United States)

^c Microconversion Technologies Company   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; CONDENSATION; PLASTIC FILMS; POLYIMIDES; SURFACE PROPERTIES; TEMPERATURE MEASUREMENT;

POLYIMIDE FILMS; SURFACE-SKIMMING BULK-WAVE (SSBW) DEVICES; TEMPERATURE SENSORS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 22944437540     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2002.803743     Document Type: Article

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