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Volumn 44, Issue 15, 2005, Pages 5691-5702

Process monitoring approach using fast moving window PCA

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CORRELATION METHODS; DECOMPOSITION; PRINCIPAL COMPONENT ANALYSIS; RECURSIVE FUNCTIONS;

EID: 22944436794     PISSN: 08885885     EISSN: None     Source Type: Journal    
DOI: 10.1021/ie048873f     Document Type: Article
Times cited : (314)

References (15)
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    • Wise, B.M.1    Gallagher, N.B.2
  • 3
    • 0001863578 scopus 로고    scopus 로고
    • Development and benchmarking of multivariate statistical process control tools for a semiconductor etch process: Improving robustness through model updating
    • Banff, Canada, June 9-11, 1997; Elsevier: New York
    • Gallagher, N. B.; Wise, B. M.; Butler, S. W.; White, D. D.; Barna, G. G. Development and benchmarking of multivariate statistical process control tools for a semiconductor etch process: Improving robustness through model updating. ADCHEM 1997, Proceedings, Banff, Canada, June 9-11, 1997; Elsevier: New York, 1997; p 78.
    • (1997) ADCHEM 1997, Proceedings , pp. 78
    • Gallagher, N.B.1    Wise, B.M.2    Butler, S.W.3    White, D.D.4    Barna, G.G.5
  • 4
    • 0038198780 scopus 로고    scopus 로고
    • Recursive partial least squares algorithms for monitoring complex industrial processes
    • Wang, X.; Kruger, U.; Lennox, B. Recursive partial least squares algorithms for monitoring complex industrial processes. Control Eng. Pract. 2003, 11 (6), 613.
    • (2003) Control Eng. Pract. , vol.11 , Issue.6 , pp. 613
    • Wang, X.1    Kruger, U.2    Lennox, B.3
  • 6
    • 0031168001 scopus 로고    scopus 로고
    • Recursive exponentially weighted PLS and its applications to adaptive control and prediction
    • Dayal, B. S.; MacGregor, J. F. Recursive exponentially weighted PLS and its applications to adaptive control and prediction. J. Process Control 1997, 7 (3), 169.
    • (1997) J. Process Control , vol.7 , Issue.3 , pp. 169
    • Dayal, B.S.1    MacGregor, J.F.2
  • 7
    • 0032044750 scopus 로고    scopus 로고
    • Recursive PLS algorithms for adaptive data modelling
    • Qin, S. J. Recursive PLS Algorithms for Adaptive Data Modelling. Comput. Chem. Eng. 1998, 22 (4/5), 503.
    • (1998) Comput. Chem. Eng. , vol.22 , Issue.4-5 , pp. 503
    • Qin, S.J.1
  • 9
    • 0025233182 scopus 로고
    • Recursive moving window DFT algorithm
    • Aravena, J. L. Recursive Moving Window DFT Algorithm. IEEE Trans. Comput. 1990, 39 (1), 145.
    • (1990) IEEE Trans. Comput. , vol.39 , Issue.1 , pp. 145
    • Aravena, J.L.1
  • 11
    • 0000246790 scopus 로고
    • Principal components and factor analysis. Part 1: Principal analysis
    • Jackson, J. E. Principal Components and Factor Analysis. Part 1: Principal Analysis. J. Qual. Technol. 1980, 12, 201.
    • (1980) J. Qual. Technol. , vol.12 , pp. 201
    • Jackson, J.E.1
  • 12
    • 0029267381 scopus 로고
    • Statistical process control of multivariate processes
    • MacGregor, J. F.; Kourti, T. Statistical process control of multivariate processes. Control Eng. Pract. 1995, 3 (3), 403.
    • (1995) Control Eng. Pract. , vol.3 , Issue.3 , pp. 403
    • MacGregor, J.F.1    Kourti, T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.