Analysis of Joule heating in multilevel interconnects

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 5, 1999, Pages 2115-2121

  Shen, Y L ^a  

^a University of New Mexico   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22844456808     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590881     Document Type: Article

References (2)

1. W. W. Lee and P. S. Ho, MRS Bull. 20, 19 (1997).
2. T. Kwok, T. Nguyen, P. Ho, and S. Yip, Proceedings of the 25th International Reliability Physics Symposium (IEEE, New York, 1987), pp. 130-135.