Study of local stress using stress-absorbing Si diaphragm

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 5, 1999, Pages 2178-2181

  Zheng, D W ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22844453814     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590888     Document Type: Article

References (3)

1. G. G. Stoney, Proc. R. Soc. London, Ser. A 82, 172 (1909).
2. A. Segmüller, J. Angilelo, and S. J. La Placa, J. Appl. Phys. 51, 6224 (1980).
3. I.-S. Yeo, P. S. Ho, and S. G. H. Anderson, J. Appl. Phys. 78, 945 (1995).