Microelectron gun integrating a point-source cathode

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 4, 1999, Pages 1390-1394

  Hammadi, Zoubida ^a  

^a CAMPUS DE LUMINY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644451966     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590765     Document Type: Article

References (5)

1. W. Stocker, H.-W. Fink, and R. Morin, Ultramicroscopy 31, 379 (1989). Combinations of low-energy point sources with a microscale lens
2. [G. M. Shed, H. Schmid, P. Unger, and H.-W. Dugner, Rev. Sci. Instrum. 64, 2579 (1993)] were done but it looks like it is difficult to replace the tip by this kind of setup, especially if it has to be approached close to a sample.
3. The best results are obtained using the D71 electrolyte from PRECI, Grenoble, France. A NaOH 2 N solution is also possible.
4. See, for example, R. Gomer, Field Emission and Field Ionizition (Harvard University Press, Cambridge, MA, 1961).
5. Computer simulations were performed using EFIELD software from Electric Field and Ion Optics Simulation, Copyright © 1990, 1995 by A. Tolmachev (Chernogolovka, Russia).