Generalization of electrostatic lens characteristics using the Picht ray trajectories

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 4, 1999, Pages 1400-1405

  Kawanami, Yoshimi ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644450981     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590767     Document Type: Article

References (9)

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8. K. Kuroda, H. Ebisu, and T. Suzuki, J. Appl. Phys. 45, 2336 (1974).
9. A. V. Crew, Optik (Stuttgart) 88, 118 (1991).