Amorphous carbon films for use as both variable-transmission apertures and attenuated phase shift masks for deep ultraviolet lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 3, 1999, Pages 930-932

  Windt, David L ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644449562     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590671     Document Type: Article

References (6)

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5. Handbook of Optical Constants of Solids, edited by E. Palik (Academic, Orlando, FL, 1986).
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