Synthesis and photoresist characteristics of a polyimide with photodegradable structure in polymer main chain

Polymer (Korea)

Volumn 23, Issue 4, 1999, Pages 604-611

  Oh, Se Young ^a   Lee, Ji Young ^a   Cho, Sung Youl ^b   Chung, Chan Moon ^b  

^a Sogang University   (South Korea)

^b Yonsei University Wonju   (South Korea)

Author keywords

Condensation polymerization; Photodegradable characteristics; Polyimide; Positive tone image; Resist material

Indexed keywords

EID: 22644449127     PISSN: 0379153X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

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