Two-dimensional analysis of temperature-gradient actuation of cantilever beam resonators

Journal of Micromechanics and Microengineering

Volumn 15, Issue 8, 2005, Pages 1414-1424

  Mahameed, Rashed ^a   Elata, David ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; MATHEMATICAL MODELS; MECHANICAL PROPERTIES; MICROACTUATORS; OPTIMIZATION; PARAMETER ESTIMATION; RESONATORS; TEMPERATURE DISTRIBUTION; THERMOMECHANICAL TREATMENT;

CANTILEVER BEAM RESONATORS; MICRORESONATORS; TEMPERATURE-GRADIENT ACTUATION; TWO-DIMENSIONAL MODEL;

CANTILEVER BEAMS;

EID: 22644440224     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/8/006     Document Type: Article

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