Annealing of niobium coatings deposited on graphite

Vacuum

Volumn 79, Issue 3-4, 2005, Pages 171-177

  Barzilai, S ^a,b   Raveh, A ^a,b   Frage, N ^a  

^a BEN GURION UNIVERSITY OF THE NEGEV   (Israel)

^b Division of Chemistry   (Israel)

Author keywords

Annealing; Coating; Niobium carbide; Sputtering

Indexed keywords

ANNEALING; CARBIDES; CHEMICAL VAPOR DEPOSITION; DIFFUSION; GRAPHITE; GROWTH (MATERIALS); MAGNETRON SPUTTERING; MICROPOROSITY; NIOBIUM COMPOUNDS; RATE CONSTANTS;

BIAS VOLTAGE; CHEMICAL INERTNESS; NIOBIUM CARBIDES; NIOBIUM COATINGS;

COATINGS;

EID: 22544451867     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.03.005     Document Type: Article

References (19)

1. Pierson HO editor. In: Handbook of carbide and nitride. NJ: 1996, Noyes Publication, (Chapter 5).
2. Barzilai S, Weiss M, Frage N, Raveh A. Surf Coat Technol, in press, available on-line.
3. J. Woodford, and Y.A. Chang Metall Mater Trans A 29A 1998 2717
4. W.M.F. Briezes, L.H. Cadoff, and J.M. Tobin J Nucl Mater 20 1966 57
5. Bornstein NS, Hirakis EC, Friedrich LA. Part & Witney (USA): TIM-927, 1965.
6. R. Resnick, R. Steinitz, and L. Siegle Trans AIME 222 1965 1918
7. P.V. Gel'd, and V.D. Liubimov Isv Akad Nauk SSSR Otd Tekhn Met I Toplivo 6 1961 19 as cited in Ref. [3]
8. M. Miyake, Y.R. Hirooka Imoto, and T. Sano Thin Solid Films 63 1979 303
9. Y. Isobe, P. Son, and M.J. Miyake Less-Common Metals 147 1989 261
10. J.A. Thornton Ann Rev Mater Sci 7 1977 239
11. R. Messier, A.P. Giri, and R.A. Roy J Vac Sci Technol A 2 1984 500
12. G.V. Kidson J Nucl Mater 3 1961 21
13. C.J. Rosa Metall Trans A 14A 1983 199
14. V.S. Eremeev, and A.S. Panov Izv Akad Nauk SSSR Neorgan Mater 4 1968 1507 as cited in Ref. [8]
15. H. Matzke Solid State Ionics 12 1984 25
16. H. Matzke Defect Diffusion Forum 83 1992 111
17. R.A. Andrievki, V.S. Eremeev, V.N. Zagryazkin, and A.S. Panov Akad Nauk SSSR Neorgan Mater 3 1967 2158 as cited in Ref. [8]
18. P.S.H. Gupta Diffusion phenomena in thin films and microelectronics materials 1987 Noyes Publication NJ (Chapter 1)
19. M. Ohring The materials science of thin films 1991 Academic Press Inc. San Diego (Chapter 8)