Initial growth processes of ultra-thin Ni-layers on Si(1 1 1) and electronic structure of epitaxially grown NiSi2

Surface Science

Volumn 588, Issue 1-3, 2005, Pages 71-82

  Nishimura, T ^a   Takeda, J ^a   Asami, Y ^a   Hoshino, Y ^a   Kido, Y ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Medium energy ion scattering; Nickel; Photoelectron spectroscopy; Silicides; Surface electronic phenomena; Surface structure

Indexed keywords

BINDING ENERGY; ELECTRONIC STRUCTURE; EPITAXIAL GROWTH; PHOTOELECTRON SPECTROSCOPY; REACTION KINETICS; SILICON; SURFACE STRUCTURE; ULTRATHIN FILMS; ANNEALING; NICKEL COMPOUNDS;

MEDIUM ENERGY ION SCATTERING; NI-SI SYSTEM; SILICIDES; SURFACE ELECTRONIC PHENOMENA;

NICKEL; ULTRATHIN FILMS;

EID: 22444443352     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2005.05.029     Document Type: Article

References (42)

1. N.W. Cheung, R.J. Culbertson, L.C. Feldman, P.J. Silverman, K.W. West, and J.W. Mayer Phys. Rev. Lett. 45 1980 120
2. R.T. Tung, J.M. Gibson, and J.M. Poate Phys. Rev. Lett. 50 1983 429
3. E.J. van Loenen, J.W.M. Frenken, J.F. van der Veen, and S. Valeri Phys. Rev. Lett. 54 1985 827
4. J.M. Gibson, and J.L. Batstone Surf. Sci. 208 1989 317
5. R.T. Tung Handbook of Semiconductors 1994 North-Holland Amsterdam Chapter 25
6. F. Comin, J.E. Rowe, and P.H. Citrin Phys. Rev. Lett. 51 1983 2402
7. R.T. Tung, and F. Schrey Appl. Phys. Lett. 55 1989 256
8. E.J. van Loenen, J.F. van der Veen, and F.K. LeGoues Surf. Sci. 157 1985 1
9. T.L. Porter, C.S. Chang, U. Knipping, and I.S.T. Tsong Phys. Rev. B 36 1987 9150
10. V. Hinkel, L. Sorba, H. Haak, K. Horn, and W. Braun Appl. Phys. Lett. 50 1987 1257
11. Y.-J. Chang, and J.L. Erskine Phys. Rev. B 26 1982 7031
12. S.C. Wu, Z.Q. Wang, Y.S. Li, F. Jona, and P.M. Marcus Solid State Commun. 57 1986 687
13. T.L. Porter, D.M. Cornelison, C.S. Chang, and I.S.T. Tsong J. Vac. Sci. Technol. A 8 1990 2497
14. S.A. Chambers, S.B. Anderson, H.W. Chen, and J.H. Wheaver Phys. Rev. B 34 1986 913
15. J.E. Rowe, G.K. Wertheim, and R.T. Tung J. Vac. Sci. Technol. A 7 1989 2454
16. J. Vrijmoeth, P.M. Zagwijn, J.W.M. Frenken, and J.F. van der Veen Phys. Rev. Lett. 67 1991 1134
17. J. Vrijmoeth, P.M. Zagwijn, E. Vlieg, J.W.M. Frenken, and P.F.A. Alkemade Surf. Sci. 290 1993 255
18. Y. Hasegawa, Y. Kuk, R.T. Tung, P.J. Silverman, and T. Sakurai J. Vac. Sci. Technol. B 9 1991 578
19. J.A. Kubby, and W.J. Greene J. Vac. Sci. Technol. A 12 1994 2009
20. Y. Hoshino, T. Nishimura, Y. Taki, Y. Asami, K. Sumitomo, and Y. Kido Surf. Sci. 511 2002 112
21. Y. Kido, H. Namba, T. Nishimura, A. Ikeda, Y. Yan, and A. Yagishita Nucl. Instrum. Methods B 136-138 1998 798
22. T. Nishimura, A. Ikeda, and Y. Kido Rev. Sci. Instrum. 69 1998 1671
23. Y. Kido, and T. Koshikawa Phys. Rev. A 44 1991 1759
24. K. Sumitomo, T. Nishioka, A. Ikeda, and Y. Kido Phys. Rev. B 56 1997 7011
25. J. Lindhard, A. Winther, and K. Dan Vidensk. Selsk. Mat.-Fys. Medd. 34 4 1964 1
26. I. Gertner, M. Meron, and B. Rosner Phys. Rev. A 18 1978 2022
27. T. Kaneko Phys. Rev. A 33 1986 1602
28. J.F. Ziegler He Stopping Powers and Ranges in All Elements 1977 Pergamon New York
29. A. Franciosi, J.H. Weaver, and F.A. Schmidt Phys. Rev. B 26 1982 546
30. O. Bisi, L.W. Chiao, and K.N. Tu Phys. Rev. B 30 1984 4664
31. R.T. Tung J. Vac. Sci. Technol. A 5 1987 1840
32. P.A. Bennett, A.P. Johnson, and B.N. Halawith Phys. Rev. B 37 1988 4268
33. R.S. Mulliken J. Chem. Phys. 23 1955 1833
34. M.C. Payne, M.P. Teter, D.A. Allan, T.A. Arias, and J.D. Joannopoulos Rev. Mod. Phys. 64 1992 1045
35. E. Pehlke, and M. Scheffler Phys. Rev. Lett. 71 1993 2338
36. S. Asada, and S. Sugano J. Phys. Soc. Jpn. 41 1976 1291
37. Y.J. Chabal, D.R. Hamann, J.E. Rowe, and M. Schlüter Phys. Rev. B 25 1982 7598
38. D.M. Bylander, L. Kleinman, K. Mednick, and W.R. Grise Phys. Rev. B 26 1982 6379
39. W.R.L. Lambrecht, N.E. Christensen, and P. Blöchl Phys. Rev. B 36 1987 2493
40. F. Manghi, G. Guidetti, and O. Bisi Appl. Surf. Sci. 56-58 1992 416
41. S. Hüfner Photoelectron Spectroscopy 1995 Springer Berlin
42. B.D. Wissman, D.W. Gidley, and W.E. Frieze Phys. Rev. B 46 1992 16058