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Volumn 1085, Issue 1, 2005, Pages 33-36
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Comparison of two Cryptand separator columns for the determination of trace chloride in semiconductor-grade nitric acid
a
AIR LIQUIDE
(France)
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Author keywords
Chloride; Inorganic acids; Ion chromatography; Statistical analysis; Trace anions
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Indexed keywords
CHLORINE;
CHROMATOGRAPHY;
NEGATIVE IONS;
NITRIC ACID;
CONTINUOUSLY REGENERATED ANION TRAP COLUMN (CR-ATC);
HIGH CAPACITY CRYPTAND PROTOTYPES;
ION CHROMATOGRAPHY (IC);
SEMICONDUCTOR MATERIALS;
CHLORIDE;
NITRIC ACID;
COMPARATIVE STUDY;
CONFERENCE PAPER;
CONFIDENCE INTERVAL;
DILUTION;
ION PAIR CHROMATOGRAPHY;
PRIORITY JOURNAL;
SEMICONDUCTOR;
STATISTICAL ANALYSIS;
ANION EXCHANGE RESINS;
BICYCLO COMPOUNDS, HETEROCYCLIC;
CHLORIDES;
CHROMATOGRAPHY, ION EXCHANGE;
NITRIC ACID;
REPRODUCIBILITY OF RESULTS;
SEMICONDUCTORS;
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EID: 22244466758
PISSN: 00219673
EISSN: None
Source Type: Journal
DOI: 10.1016/j.chroma.2005.01.048 Document Type: Conference Paper |
Times cited : (6)
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References (9)
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