Micromachining approach in fabricating of THz waveguide components

Microelectronics Journal

Volumn 36, Issue 7, 2005, Pages 683-686

  Pavolotsky, A ^a   Meledin, D ^a   Risacher, C ^a   Pantaleev, M ^a   Belitsky, V ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

Bolometers; Heterodyne receivers; Infrared; Micromachining; Submillimeter waveguide components; Submillimeter waves; Waveguide coupler

Indexed keywords

BOLOMETERS; HETERODYNING; INFRARED RADIATION; MICROWAVES; SUBMILLIMETER WAVES; SURFACE ROUGHNESS; ULTRASONICS; WAVEGUIDE COUPLERS;

HETERODYNE RECEIVERS; SILICON SUBSTRATE; SUBMILLIMETER WAVEGUIDE COMPONENTS; WAVEGUIDE STRUCTURES;

MICROMACHINING;

EID: 22144484517     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2005.04.041     Document Type: Article

References (10)

1. S. Paine, P. Blundell, D.C. Papa, J.W. Barrett, and S.J. Radford A Fourier transform spectrometer for measurement of atmospheric transmission at submillimeter wavelengths PASP 112 2000 108 118
2. R.L. Brown Technical specification of the millimeter array Proc.SPIE-Int. Soc. Opt. Eng. 3357 1998 231 441
3. J. Black Scientific drivers for APEX presented on Masers and Molecules, workshop, Särö, Sweden, September 18-19 2003
4. S.A. Maas Microwave Mixers 2nd ed. 1993 Artech House Boston, MA
5. G. Matthaei, L. Young, and E.M.T. Jones Microwave Filters Impedance-matching Networks, and Coupling Structures 1980 Artech House, Inc pp. 775-842
6. N. Marcuvitz Waveguide Handbook 1951 McGraw Hill New York
7. Agilent Technologies, 395 Page Mill Road, Palo Alto, CA 94304 USA.
8. Brewer Science, Inc., Specialty Materials Division 2401 Brewer Drive, Rolla, Missouri 65401 USA.
9. MicroChem Corp., 1254 Chestnut Street, Newton, MA 02464 USA.
10. Galvanord Galvano & PCB Teknik, Bybjergvej 7, DK 3060, Espergærde, Denmark.