Kinetics of plasma-assisted boriding

Surface and Coatings Technology

Volumn 199, Issue 1, 2005, Pages 1-6

  Filep, Emöd ^a   Farkas, Szabolcs ^b  

^a SAPIENTIA HUNGARIAN UNIVERSITY OF TRANSYLVANIA   (Romania)

^b Flextronics Photonics   (United States)

Author keywords

Boron; Kinetics of deposition; Plasma deposition

Indexed keywords

BORON COMPOUNDS; CATHODES; CONDENSATION; ISOTHERMS; LAMINAR FLOW; PLASMA HEATING; REACTION KINETICS; STEEL;

BORON TRICHLORIDE; GAS MIXTURES; NON-ISOTHERMAL REACTORS; PLASMA DISCHARGES;

BORIDING;

VAPOR DEPOSITION;

EID: 22044445803     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.03.031     Document Type: Article

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