An algorithm for computing linear four-point probe thickness correction factors

Review of Scientific Instruments

Volumn 72, Issue 9, 2001, Pages 3580-3586

  Weller, Robert A ^a  

^a VANDERBILT UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21944442871     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1394186     Document Type: Article

References (13)

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3. 1999 Annual Book of ASTM Standards (American Society for Testing Materials, West Conshohocken, PA, 1999), Vol. 10.05, standard F374-94a.
4. 1999 Annual Book of ASTM Standards (American Society for Testing Materials, West Conshohocken, PA, 1999), Vol. 10.05, standard F1529-97.
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10. The reader is cautioned, however, that casually evaluating Eq. (25) without considering technicalities such as loss of precision in subtractions may result in five or six fewer significant digits.
11. D. K. Schroder, Semiconductor Material and Device Characterization, 2nd ed. (Wiley, New York, 1998), p. 8.
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