Physical Chemistry of Hydrogenous Species in the Si-SiO2 System

Zeitschrift fur Naturforschung - Section A Journal of Physical Sciences

Volumn 50, Issue 7, 1995, Pages 653-665

  Poindexter, Edward H ^a  

^a U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21844507156     PISSN: 09320784     EISSN: 18657109     Source Type: Journal    
DOI: 10.1515/zna-1995-0705     Document Type: Article

References (50)

1. B. E. Deal, M. Sklar, A. S. Grove, and E. H. Snow, J. Electrochem. Soc. 114, 266 (1967).
2. E. H. Nicollian and J. R. Brews, MOS (Metal-Oxide-Semiconductor) Physics and Technology, (Wiley-Inter-sci. New York 1982, p. 794.
3. G. J. Gerardi, E. H. Poindexter, P. J. Caplan, M. Harmatz, W. R. Buchwald, and N. M. Johnson, J. Electrochem. Soc. 136, 2609 (1989).
4. C. E. Blat, E. H. Nicollian, and E. H. Poindexter, J. Appl. Phys. 69, 1712 (1991).
5. G. J. Gerardi, E. H. Poindexter, M. Harmatz, W. L. Warren, E. H. Nicollian, and A. H. Edwards, J. Electrochem. Soc. 138, 3765 (1991).
6. B. E. Deal and A. S. Grove, J. Appl. Phys. 36, 3770 (1965).
7. 2 Interface, C. R. Helms and B. E. Deal, Eds., Plenum, New York 1988, p. 177.
8. G. L. Holmberg, A. B. Kuper, and F. D. Miraldi, J. Electrochem. Soc. 117, 677 (1970).
9. E. H. Poindexter and G. J. Gerardi, Colloids and Surfaces 45, 213 (1990).
10. R. Pfeffer and M. Ohring, J. Appl. Phys. 52, 777 (1981).
11. K. L. Brower, P. M. Lenahan, and P. V. Dressendorfer, Appl. Phys. Lett. 41, 251 (1982).
12. N. M. Johnson, D. K. Biegelsen, and M. D. Moyer, J. Vac. Sci. Technol. 19, 390 (1981).
13. P. J. Caplan and N. M. Johnson, unpublished results.
14. M. L. Reed and J. D. Plummer, J. Appl. Phys. 63, 5776 (1988).
15. K. L. Brower, Phys. Rev. B 38, 9657 (1988).
16. D. L. Griscom, J. Appl. Phys. 58, 2524 (1985).
17. N. S. Saks and D. B. Brown, IEEE Trans. Nucl. Sci. 36, 1848 (1989).
18. R. E. Stahlbush, A. H. Edwards, D. L. Griscom, and B. J. Mrstik, J. Appl. Phys. 73, 658 (1993).
19. A. H. Edwards, unpublished results.
20. B. I. Vikhrev, N. N. Gerasimenko, and G. P. Lebedev, Mikroelektronika 6, 71 (1977).
21. Z. Li, S. J. Fonash, E. H. Poindexter, M. Harmatz, F. Rong, and W. R. Buchwald, J. Non-Cryst. Solids 126, 173 (1990).
22. J. F. Conley and P. M. Lenahan, Appl. Phys. Lett. 62, 40 (1993).
23. L. DoThanh and P. Balk, J. Electrochem. Soc. 135, 1797 (1988).
24. E. Cartier, J. H. Stathis, and D. A. Buchanan, Appl. Phys. Lett. 63, 1510 (1993).
25. K. L. Brower, Phys. Rev. B. 42, 3444 (1990).
26. E. H. Nicollian and J. R. Brews, ibid., 790.
27. R. K. Iler, The Chemistry of Silica, Wiley, New York 1979, p. 622–648.
28. H. P. Boehm and H. Knozinger, in Catalysis Science and Technology, J. R. Anderson and M. Boudart, Eds. Springer, Berlin 1983, pp. 40–207.
29. A. V. Kiselev and V. I. Lygin, Infrared Spectra of Surface Compounds, Wiley, New York 1975, pp. 75–103, 123—157, 162.
30. A. K. Kronenberg, in Silica: Physical Behavior, Geo-chemistry, and Materials Applications, P. J. Heaney, C. T. Prewitt, and G. V. Gibbs, Eds., Mineralogical Society of America, Washington 1994, p. 123.
31. M. Heggie and R. Jones, Phil. Mag. Lett. 55, 47 (1987).
32. K. Klier and A. C. Zettlemoyer, J. Colloid Interface Sci. 58, 216 (1977).
33. A. J. Moulson and J. P. Roberts, Trans. Faraday Soc. 57, 1208 (1961).
34. R. A. Marcus, Discuss. Faraday Soc. 29, 21 (1960).
35. B. E. Conway, Ionic Hydration in Chemistry and Biophysics, Elsevier, Amsterdam 1981, p. 394, 404.
36. 2 Interface, C. R. Helms and B. E. Deal, Eds., Plenum, New York 1988, p. 299.
37. D. L. Griscom, Nucl. Instrum. Meth. Phys. Res. B-l, 481 (1984).
38. D. L. Griscom, in Structure and Bonding in Noncrystalline Solids, G. E. Walrafen and A. G. Revesz, Eds., Plenum, New York 1986, p. 369.
39. D.-F. Feng and L. Kevan, Chem. Rev. 80, 1 (1980).
40. T. E. Tsai, D. L. Griscom, and E. J. Friebele, Phys. Rev. B 40, 6374 (1989–11).
41. R. A. Weeks and M. Abraham, J. Chem. Phys. 42, 68 (1965).
42. M. E. Markes and L. E. Halliburton, J. Appl. Phys. 50, 8172 (1979).
43. J. Isoya, J. A. Weil, and P. H. Davis, J. Phys. Chem. Solids 44, 335 (1983).
44. A. Kats, Philips Research Repts. 17, 201 (1962).
45. J. Isoya, J. A. Weil, and L. E. Halliburton, J. Chem. Phys. 74, 5436 (1981).
46. S. C. Elphick and C. M. Graham, Nature London 335, 243 (1988).
47. S. K. Estreicher and D. M. Maric, Phys. Rev. Lett. 70, 3963 (1993).
48. C. G. Van de Walle, P. J. H. Denteener, Y. Bar-Yam, and S. T. Pantelides, Phys. Rev. B 39, 10791 (1989-II).
49. N. M. Johnson, C. Herring, and C. G. Van de Walle, Phys. Rev. Lett. 73, 130 (1994).
50. R. R. Razouk, L. N. Lie, and B. E. Deal, J. Electrochem. Soc. 128, 2214 (1981).