Methods to enhance absorption signals in infrared reflectance spectroscopy: A comparison using optical simulations

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 13, Issue 4, 1995, Pages 2005-2012

  Abelson, J R ^b  

^a MOTOROLA INC   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21844502943     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.579644     Document Type: Article

References (41)

1. J.E. Crowell and G. Lu, J. Electron Spectrosc. Relat. Phenom. 54-55, 1045 (1990).
2. K.J. Uram and U. Jansson, Surf. Sci. 249, 105 (1991).
3. R. Tsu, H.Z. Xiao, Y.W. Kim, M.A. Hasan, H.K. Bimbaum, J.E. Greene, D.S. Lin, and T.C. Chiang, J. Appl. Phys. 75, 240 (1994).
4. S.M. Gates, Surf. Sci. 195, 307 (1988).
5. S.M. Gates, R.R. Kunz, and C.M. Greenlief, Surf Sci. 207, 364 (1989).
6. S.K. Kulkami, S.M. Gates, C.M. Greenlief, and H.H. Sawin, Surf Sci. 239, 26 (1990).
7. M. Kawasaki and H. Suzuki, J. Appl. Phys. 75, 3456 (1994).
8. D.D. Koleske, S.M. Gates, and B. Jackson, J. Chem. Phys. 101, 3301–3309 (1994).
9. D.E. Aspnes, J.B. Theeten, and F. Hottier, Phys. Rev. B20, 3292 (1979).
10. R.W. Collins, in Advances in Amorphous Semiconductors, edited by H. Fritzsche (World Scientific, Singapore, 1989), p. 1003.
11. Y.J. Chabal, in Semiconductors Interfaces: Formation and Properties, Springer Proceedings in Physics Vol. 22, edited by G. Lelay, J. Derrien, and N. Boccara (Springer, Berlin, 1987), p. 301.
12. K.C. Mandal, I. Ozanam, and J.N. Chazalviel, Appl. Phys. Lett. 57, 2788 (1990).
13. P.M.A. Sherwood, Vibrational Spectroscopy of Solids (Cambridge University Press, Cambridge, 1972), p. 74.
14. Y.J. Chabal, Surf. Sci. Rep. 8, 211 (1988).
15. R.J.E. Reutt, D.J. Doren, Y.J. Chabal, and S.B. Christman, Phys. Rev. Lett. 61, 2278 (1988).
16. A. Langford, M.L. Fleet, B.P. Nelson, W.A. Lanford, and N. Maley, Phys. Rev. B45, 13367 (1992).
17. H. Ibach, Surf. Sci. 66, 56 (1977).
18. O.S. Heavens, Optical Properties of Thin Solid Films (Academic, New York, 1955), Chap. 2.
19. P. Baumeister, R. Hahn, and D. Harrison, Opt. Acta 19, 853 (1972).
20. M.H. Brodsky, M. Cardona, and J.J. Cuomo, Phys. Rev. B16, 3556 (1977).
21. G.F. Feng (unpublished).
22. E.D. Palik, Handbook of Optical Constants of Solids (Academic, Orlando, FL, 1985).
23. R.G. Greenler, J. Vac. Sci. Technol. 12, 1410 (1975).
24. S.A. Francis and A.H. Ellison, J. Opt. Soc. Am. 49, 131 (1959).
25. R.G. Greenler, J. Chem. Phys. 44, 310 (1966).
26. Y. Toyoshima, K. Arai, A. Matsuda, and K. Tanaka, Appl. Phys. Lett. 56 1540 (1990).
27. Y. Toyoshima, A. Matsuda, and K. Arai, J. Non-Cryst. Solids 164–166, 103 (1993).
28. J. Pritchard, in Chemical Physics of Solids and Their Surfaces, edited by M.W. Roberts and J.M. Thomas (Chemical Society, Princeton, NJ, 1978), Vol. 7, p. 157.
29. J.D.E. McIntyre and D.E. Aspnes, Surf. Sci. 24, 417 (1971).
30. D.P. Woodruff and T.A. Delchar, Modern Techniques of Surface Studies (Cambridge University Press, Cambridge, 1986), Chap. 9.
31. D.L. Allara, A. Baca, and C.A. Pryde, Macromolecules 11, 1215 (1978).
32. M.McGonigal, V.M. Bermudez, and J.E. Butler, J. Electron Spectrosc. Relat. Phenom. 54-55, 1033 (1990).
33. N.J. Harrick, Phys. Rev. Lett. 4, 224 (1960).
34. J. Fahrenfort, Spectrochim. Acta 17, 698 (1961).
35. N. Maley, I. Szafranek, L. Mandrell, M. Katiyar, J.R. Abelson, and J.R. Thornton, J. Non-Cryst. Solids 114, 163 (1989).
36. M. Katiyar, G.F. Feng, Y.H. Yang, J.R. Abelson, and N. Maley, Appl. Phys. Lett. 63, 461 (1993).
37. M. Katiyar, G.F. Feng, Y.H. Yang, J.R. Abelson, and N. Maley, J. Non-Cryst. Solids 164–166, 111 (1993).
38. M. Katiyar, Y.H. Yang, and J.R. Abelson, J. Appl. Phys. 77, 6247 (1995).
39. B. Drevillon and R. Benferhat, J. Appl. Phys. 63, 5088 (1988).
40. R. Benferhat, B. Drevillon, and P. Robin, Thin Solid Films 156, 295 (1988).
41. N. Blayo, P. Blan, and B. Drevillon, Physica B170, 566 (1991).