Electron-beam lithography for micro and nano-optical applications

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5720, Issue , 2005, Pages 68-77

  Wilson, Daniel W ^a,c   Muller, Richard E ^a   Echternach, Pierre M ^a   Backlund, Johan P ^a,b  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b Alfa Exx AB   (Sweden)

^c MS 302 231 ^*  (United States)

Author keywords

Diffractive optics; Electron beam lithography; Micro optics; Nanostructure fabrication

Indexed keywords

BLAZED DIFFRACTION GRATINGS; E-BEAM RESISTS; NANO-OPTICAL DEVICES; NANOSTRUCTURE FABRICATION;

DIFFRACTION GRATINGS; DIFFRACTIVE OPTICS; ETCHING; MICROOPTICS; NANOTECHNOLOGY; OPTICAL DEVICES; POLYMETHYL METHACRYLATES; SCANNING ELECTRON MICROSCOPY;

ELECTRON BEAM LITHOGRAPHY;

EID: 21844478517     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600784     Document Type: Conference Paper

References (20)

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