Optimized capacitive MEMS microphone for photoacoustic spectroscopy (PAS) applications

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5732, Issue , 2005, Pages 108-121

  Pedersen, Michael ^a   McClelland, John ^b  

^a Novusonic Corp   (United States)

^b MTEC Photoacoustics Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LIFETIME; PHOTOACOUSTIC SIGNAL TRANSDUCERS; PHOTOACOUSTIC SPECTROMETERS; TUNABILITY;

CAPACITANCE; ENERGY EFFICIENCY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHT MODULATORS; LIGHT SOURCES; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; PHOTOACOUSTIC SPECTROSCOPY; SIGNAL TO NOISE RATIO; SPECTROMETERS; TRANSDUCERS;

MICROPHONES;

EID: 21844463808     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.597136     Document Type: Conference Paper

References (8)

1. A. Rosencwaig, Photoacomtics and Photoacoustic Spectroscopy, Krieger Publishers, 1990.
2. L.L. Beranek, Acoustics, Acoustical Society of America, 1996.
3. S. Timoshenko & S. Woinowsky-Krieger, Theory of Plates and Shells, McGraw-Hill, 1970.
4. Brüel & Kjær product data sheet, The Falcon Range 1/2" Microphones - Types 4188 to 4193.
5. M. Pedersen, A polymer condenser microphone realised on silicon containing preprocessed integrated circuits, Ph.D. dissertation, University of Twente, The Netherlands, 1997.
6. Brüel & Kjær Technical Review, Gas Monitoring, No. 1, 1990.
7. US Patent no. 6,535,460, Miniature broadband acoustic transducer.
8. K. Wilcken & J. Kauppinen, Optimization of a Microphone for Photoacoustic Spectroscopy, Applied Spectroscopy, Vol. 57, No. 9, 2003, pp. 1087-1092.