Back-illuminated solar-blind photodetectors for imaging applications

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5732, Issue , 2005, Pages 175-184

  McClintock, Ryan ^a   Yasan, Alireza ^a   Mayes, Kathryn ^a   Kung, Patrick ^a   Razeghi, Manijeh ^a  

^a NORTHWESTERN UNIVERSITY   (United States)

Author keywords

AlGaN; Back Illuminated; Detector; Focal Plane Array; p i n; Solar Blind; Ultraviolet

Indexed keywords

ALUMINUM NITRIDE; ASTRONOMY; ENERGY GAP; GALLIUM NITRIDE; IMAGING TECHNIQUES; LIGHTING; OPTOELECTRONIC DEVICES;

ALGAN; BACK-ILLUMINATED; FOCAL PLANE ARRAYS (FPA); P-I-N; SOLAR-BLIND; ULTRAVIOLET (UV) IMAGING;

ULTRAVIOLET DETECTORS;

EID: 21844463533     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.597077     Document Type: Conference Paper

References (11)

1. P. Kung, A Yasan, R. McClintock, S.R. Darvish, K. Mi, M. Razeghi, "Future of AlxGal-xN materials and device technology for ultraviolet photodetectors", Proc. SPIE, vol. 4650, pp. 199-206, (2002).
2. M. Razeghi, "Short-wavelength solar-blind detectors- status, prospects, and markets", Proc. IEEE, vol. 90, pp. 1006-1014, (2002).
3. M. Ulmer, M. Razeghi, E. Bigan, "Ultra-Violet Detectors for Astrophysics, Present and Future," in Optoelectronic Integrated Circuit Materials, Physics, and Devices, ed. Manijeh Razeghi, Yoon-Soo Park and Gerald L. Witt, SPIE Proceedings Series, vol. 2397 pp. 210-216, Bellingham, Wash.: SPIE-The International Society for Optical Engineering, (1995).
4. J.D. Brown, Zhonghai Yu, J. Matthews, S. Harney, J. Boney, J. F. Schetzina, J. D. Benson, K. W. Dang, C. Terrill, Thomas Nohava, Wei Yang, and Subash Krishnankutty, "Visible-Blind UV Digital Camera Based On a 32 × 32 Array of GaN/AlGaN p-i-n Photodiodes", MRS Internet Journal of Nitride Semiconductor Research, 4(9), (1999).
5. J.D. Brown, J. Matthews, S. Harney, J. Boney, J. F. Schetzina, J. D. Benson, K. V. Dang, T. Nohava, W. Yang, and S. Krishnankutty, "High-Sensitivity Visible-Blind AlGaN Photodiodes and Photodiode Arrays", MRS Internet Journal of Nitride Semiconductor Research, 5S1(W1.9), (1999).
6. B. Yang, K. Heng, T. Li, C. J. Collins, S. Wang, R. D. Dupuis, J. C. Campbell, M. J. Schurman, and I. T. Ferguson, "32 × 32 Ultraviolet Al Ga N/GaN p-i-n Photodetector Array", Quantum Electronics Letters, 36(11), 1229 (2000).
7. J.D. Brown, J. Boney, J. Matthews, P. Srinivasan, and J.F. Schetzina, "UV-Specific (320-365 nm) Digital Camera Based On a 128×128 Focal Plane Array of GaN/AlGaN p-i-n Photodiodes", MRS Internet Journal of Nitride Semiconductor Research, 5(6), (2000).
8. R. McClintock, A. Yasan, K. Mayes, D. Shiell, S.R. Darvish, P. Kung and M. Razeghi, "High quantum efficiency AlGaN solar-blind p-i-n photodiodes", Applied Physics Letters, 84, 1248, (2004).
9. R. McClintock, A. Yasan, K. Mayes, D. Shiell, S.R. Darvish, P. Kung and M. Razeghi, "High Quantum Efficiency Solar-Blind Photodetectors", Proceeding of the SPIE, 5359, 434 (2004).
10. J. Jiang, K. Mi, R. McClintock, M. Razeghi, G.J. Brown, C. Jelen, "Demonstration of 256×256 Focal Plane Arrays Based on Al-free GaInAs/toP QWIP", Photonics Technology Letters, IEEE, 15(9), 1273 (2003).
11. C. H. Chen, H. Liu, D. Steigerwald, W. Imler, C. P. Kuo, M. G. Craford, M. Ludowise, S. Lester, and J. Amano, "A study of parasitic reactions between NH3 and TMGa or TMAl", J Electron. Mater. 25, 1004 (1996).