Large silicon micromirror modelling and fabrication

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5717, Issue , 2005, Pages 108-116

  Marchese, A ^a   Camon, H ^a   Ganibal, C ^a  

^a LAAS CNRS   (France)

Author keywords

Bulk silicon micromachining; Characterization; Global system simulation; Laser beam switching; MOEMS

Indexed keywords

CHARACTERIZATION; COMPUTER SIMULATION; FABRICATION; LASER BEAM EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SILICON; SWITCHING;

BULK SILICON MICROMACHINING; GLOBAL SYSTEM SIMULATION; LASER BEAM SWITCHING; MOEMS;

MIRRORS;

EID: 21844460521     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.590270     Document Type: Conference Paper

References (5)

1. B. Wagner, H. J. Quenzer, S. Hoerschelmann, T. Lisec and M. Juerss, The Ninth Annual International Workshop on Micro Electro Mechanical Systems, San Diego, USA, February 11-15, 1996.
2. L. Landau, E. Lifchitz, Theory of Elasticity, Editions MIR, Moscou, 1966.
3. th Edition, Roark's Formulas for Stress and Strains, Mc Graw-Hill Book Company, 1989.
4. F. Larnaudie, Micro-miroirs électrostatiques réalisé s en technologie silicium (thesis), CNRS, 2000.
5. P. Temple-Boyer, C. Rossi, E. Saint-Etienne, E. Scheid, J. Vac. Technol. A, vol. 16, n° 4, 1998.