A novel piezoelectric interdigital transducer for the excitation of high frequency surface acoustic waves

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2004, Pages 441-444

  Daniau, W ^a   Kumar, A K Sarin ^b,c   Paruch, P ^b,c   Marre D ^d   Triscone, J M ^b,c   Ballandras, S ^a  

^a FEMTO ST INSTITUTE   (France)

^b UNIVERSITY OF GENEVA   (Switzerland)

^c NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Norway)

^d INFM   (Italy)

Author keywords

AFM; Epitaxial PZT layer; Ferroelectrics; Piezoelectric inter digital transducer (PIT); Piezoresponse; Poled domain; Surface acoustic waves (SAW)

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON BEAM LITHOGRAPHY; FERROELECTRIC MATERIALS; FINITE ELEMENT METHOD; FREQUENCIES; LIGHT POLARIZATION; PIEZOELECTRIC TRANSDUCERS; SINGLE CRYSTALS; THIN FILMS;

EPITAXIAL PZT LAYER; PIEZOELECTRIC INTER-DIGITAL TRANSDUCER (PIT); PIEZORESPONSE; POLED DOMAIN; SURFACE ACOUSTIC WAVES (SAW);

ACOUSTIC WAVES;

EID: 21644485696     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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