Fabrication of a micro/nano integrated roughened structure using Nanosphere Lithography(NSL)

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn , Issue , 2004, Pages 463-468

  Thangawng, Abel L ^a   Lee, Junghoon ^b  

^a Northwestern University   (United States)

^b Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CLEANING; COATINGS; HYDROPHOBICITY; LITHOGRAPHY; MOLDING; NANOSTRUCTURED MATERIALS; PLASMA ETCHING; SURFACE ROUGHNESS; WATER;

NANOSPHERE LITHOGRAPHY (NSL); ROUGHNESS GEOMETRY; SELF-CLEANING; SUPERHYDROPHOBIC SURFACES;

FABRICATION;

EID: 21644480816     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-62248     Document Type: Conference Paper

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