메뉴 건너뛰기




Volumn , Issue , 2004, Pages 851-854

45nm nMOSFET with metal gate on thin SiON driving 1150μA/μm and off-state of 10nA/μm

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CARRIER MOBILITY; ELECTRIC CURRENTS; ELECTRODES; ETCHING; GATES (TRANSISTOR); PHYSICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR JUNCTIONS; METALS; MOS DEVICES; MOSFET DEVICES; NITROGEN COMPOUNDS; SILICON COMPOUNDS;

EID: 21644463571     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (14)

References (6)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.