SAW and BAW response of c-axis AlN thin films sputtered on platinum

Proceedings - IEEE Ultrasonics Symposium

Volumn 2, Issue , 2004, Pages 1367-1370

  Clement, M ^a   Vergara, L ^a   Olivares, J ^a   Iborra, E ^a   Sangrador, J ^a   Sanz Hervas A ^a   Zinck, C ^b  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^b CEA LETI   (France)

Author keywords

Aluminum nitride; BAW; Elclromechamcal coupling; SAW

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ACOUSTIC SURFACE WAVE DEVICES; ALUMINUM NITRIDE; FREQUENCY RESPONSE; PIEZOELECTRICITY; PLATINUM; SPUTTERING; X RAY DIFFRACTION ANALYSIS;

BULK ACOUSTIC WAVE (BAW) DEVICES; CRYSTAL QUALITY; ELECTROMECHANICAL COUPLING; PIEZOELECTRIC RESPONSE; SURFACE ACOUSTIC WAVE (SAW) DEVICES;

THIN FILMS;

EID: 21644456969     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)

1. V. Mortel et al., "Deposition of aluminium nitride film by magnetron sputtering for diamond-based surface acoustic wave applications", Phys. Slat. Sol (a), Vol. 193, 2002, pp. 482-488.
2. T. Palacios et al., "Nanotechnology for SAW devices on AlN epilayers", Mat. Sci. Eng., Vol. B39, 2002, pp.154-158.
3. R. Jakkaraju, et al., "Integrated approach to electrode and AlN depositions for bulk acoustic wave (BAW) devices" Microelectronic Engineering, Vol. 70, 2003, pp. 566-570.
4. T. Nishihara, T. Yokoyama, T. Miyashita, Y. Satoh, "High performance and miniature thin film bulk acoustic wave filters for 5 GHz", Proc. IEEE Ultrasonic Symposium, Vol. 1, 2002, pp. 969-972.
5. C. Zinck, A. de Grave, R Jakkaraju, E. Defay, M. Harris, "A piezoelectric actuated SiN clamp-clamp beam for micro switch applications". Proc. Thinfilms 2004, Singapore (2004).
6. J. A. Ruffner, P.G. Clem, B.A. Tuttle, D. Dimos, D.M. Gonzales, "Effect of substrate composition on the piezoelectric response of reactively sputtered AlN thin Films", Thin Solid Films, Vol. 354, 1999, pp. 256-261.
7. L. Sagalowicz, et al., "Microstructure and Defects of Wurtzite Structure Thin Films", J. Europ. Cer. Soc., Vol. 19, 1999, pp. 1427-1430.
8. J. H. Harris, R.A. Youngman, R.G. Teller, "On the nature of the oxygenrelated defect in aluminum nitride", J. Mater. Res. Vol. 5, 1990, 1763-1773.
9. E. Iborra, et al., "Effect of particle bombardment on the orientation and the residual stress of sputtered AlN films for SAW devices", IEEE Transactions on Ultrasonics. Ferroelectrics, and Frequency Control. Vol. 51, 2004, pp. 352-358.
10. M.A. Dubois, P. Muralt, "Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering" J. Appl. Phys. Vol. 89, 2001, pp. 6389-6395.
11. M. Clement, el al., "Influence of sputtering mechanisms on the preferred orientation of aluminum nitride thin films", J. Appl. Phys., Vol. 94, 2003, pp. 1495-1500.
12. H. P. Loebl, et al., "Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators", Mat. Chem. Phys., Vol. 79, 2003, pp. 143-146.
13. E. Iborra, et al., "A Model for the Accurate Determination of the Electromechanical Coupling Factor of Thin Film SAW Devices on Non-insulating Substrates", IEEE International Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniversar Joint Conference (2004).
14. th European Conference on Diamond, Diamondlike Materials, Carbon Nanotubes, Nitrides & Silicon Carbide, Riva del Garda (Italy). 12-17 September, 2004.
15. E. Iborra, et al., "Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications", Sensors & Actuators A (in press).
16. A. Rodriguez-Navarro, W. Otaño-Rivera. J.M. Garcia-Ruiz, R. Messier, L.J. Pilione, "Preparation of highly oriented polycrystalline AlN thin films deposited on glass at oblique-angle incidence", J. Mater. Res., Vol. 12, 1997, pp. 1689-1692.
17. T. H. De Keijser E. J. Mittemeijer, H. C. F. Rozendaal, "The determination of crystallite-size and lattice-strain parameters in conjunction with the profile-refinement method for the determination of crystal structures," J. Appl. Cryst., Vol. 16, 1983, pp.309-316.
18. G. Carlotti, G. Gubbioti, F.S. Hickemell, H.M. Liaw, G. Socino, "Comparative study of the elastic properties of polycrcrystalline aliminum nitride films on silicon by Brillouin light scattering", Thin Solid Films, Vol. 310, 1997, pp. 34-38.
19. 3 amd AIN/Si", Proc. IEEE Ultrasonic Symposium. Vol. 1, 1981, pp. 375-380.
20. D. Berlincourt, H. Jaffe, L.R. Shiozawa, "Electroelastic properties of the sulfides, selenides,and tellurides of zinc and cadmium", Phys. Rev., Vol 129, 1963, 1009-1017.