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Volumn 3, Issue , 2004, Pages 1872-1875

A silicon capacitive microphone based on oxidized porous silicon sacrificial technology

Author keywords

Oxidized porous silicon; Sacrificial layer; Silicon capacitive microphone

Indexed keywords

CAPACITANCE; DOPING (ADDITIVES); MICROELECTROMECHANICAL DEVICES; OXIDATION; POROUS SILICON; PRESSURE EFFECTS; SOLUTIONS;

EID: 21644448749     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (16)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.