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Volumn 3, Issue , 2004, Pages 1872-1875
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A silicon capacitive microphone based on oxidized porous silicon sacrificial technology
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Author keywords
Oxidized porous silicon; Sacrificial layer; Silicon capacitive microphone
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Indexed keywords
CAPACITANCE;
DOPING (ADDITIVES);
MICROELECTROMECHANICAL DEVICES;
OXIDATION;
POROUS SILICON;
PRESSURE EFFECTS;
SOLUTIONS;
ACOUSTIC MEMBRANES;
OXIDIZED POROUS SILICON;
SACRIFICIAL LAYERS;
SILICON CAPACITIVE MICROPHONES;
MICROPHONES;
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EID: 21644448749
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (16)
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References (5)
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