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Journal of Applied Physics

Volumn 64, Issue 1, 1988, Pages 323-330

Effect of process parameters on stress development in two-dimensional oxidation

a IBM (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21544471619 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.341430 Document Type: Article

Times cited : (30)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.