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Volumn 35, Issue 1, 1979, Pages 8-10
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Stress in thermal SiO2 during growth
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 21544464097
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.90905 Document Type: Article |
Times cited : (246)
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References (8)
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