메뉴 건너뛰기
Applied Physics Letters
Volumn 58, Issue 7, 1991, Pages 732-734
Effects of low-dose Si implantation damage on diffusion of phosphorus and arsenic in Si
(2)
Park, Heemyong
a
Law, Mark E
a
a
UNIVERSITY OF FLORIDA
(
United States
)
Author keywords
[No Author keywords available]
Indexed keywords
EID
:
21544457823
PISSN
:
00036951
EISSN
:
None
Source Type
:
Journal
DOI
:
10.1063/1.104530
Document Type
:
Article
Times cited : (
24
)
References (
18
)
1
36549092262
(1987)
Appl. Phys. Lett.
, vol.51
, pp. 487
Michel, A.E.
1
Rausch, W.
2
Ronsheim, P.A.
3
2
21544444489
(1988)
J. Appl. Phys.
, vol.63
, pp. 1452
Sedgwick, T.O.
1
Michel, A.E.
2
Deline, V.R.
3
Cohen, S.A.
4
Lasky, J.B.
5
3
21544484534
(1988)
Appl. Phys. Lett.
, vol.52
, pp. 813
Ajmera, A.C.
1
Rozgonyi, G.A.
2
Fair, R.B.
3
4
0024629164
(1989)
J. Electron. Mater.
, vol.18
, pp. 143
Kim, Y.
1
Massoud, H.Z.
2
Fair, R.B.
3
5
21544463086
(1989)
Appl. Phys. Lett.
, vol.55
, pp. 2316
Kim, Y.M.
1
Lo, G.Q.
2
Kwong, D.L.
3
Tseng, H.H.
4
Hance, R.
5
6
36549098671
(1990)
Appl. Phys. Lett.
, vol.56
, pp. 1787
Packan, P.A.
1
Plummer, J.D.
2
7
0021477364
(1984)
Appl. Phys. Lett.
, vol.45
, pp. 417
Oehrlein, G.S.
1
Cohen, S.A.
2
Sedgwick, T.O.
3
8
0022221050
(1985)
Mater. Res. Soc. Symp. Proc.
, vol.35
, pp. 341
Morehead, F.F.
1
Hodgson, R.T.
2
9
21544462510
(1987)
J. Appl. Phys.
, vol.61
, pp. 1834
Servidori, M.
1
Angelucci, R.
2
Cembali, F.
3
Negrini, P.
4
Solmi, S.
5
Zaumseil, P.
6
Winter, U.
7
10
0023531957
(1987)
J. Electrochem. Soc.
, vol.134
, pp. 3130
Angelucci, R.
1
Cembali, F.
2
Negrini, P.
3
Servidori, M.
4
Solmi, S.
5
11
0009782636
(1989)
Appl. Phys. A
, vol.48
, pp. 255
Solmi, S.
1
Cembali, F.
2
Fabbri, R.
3
Servidori, M.
4
Canteri, R.
5
12
0006420115
(1987)
J. Appl. Phys.
, vol.62
, pp. 1723
Servidori, M.
1
Sourek, Z.
2
Solmi, S.
3
13
0021169030
(1984)
Appl. Phys. Lett.
, vol.44
, pp. 107
Kalish, R.
1
Sedgwick, T.O.
2
Mader, S.
3
Shatas, S.
4
14
0021510887
(1984)
J. Electrochem. Soc.
, vol.131
, pp. 2387
Fair, R.B.
1
Wor:man, J.J.
2
Liu, J.
3
15
0004904827
(1985)
Appl. Phys. Lett.
, vol.47
, pp. 848
Sedgwick, T.O.
1
Michel, A.E.
2
Cohen, S.A.
3
Deline, V.R.
4
Oehrlein, G.S.
5
16
0004865789
(1986)
Appl. Phys. Lett.
, vol.49
, pp. 1468
Angelucci, R.
1
Negrini, P.
2
Solmi, S.
3
17
0023860584
(1988)
Appl. Phys. A
, vol.45
, pp. 1
Jones, K.S.
1
Prussin, S.
2
Weber, E.R.
3
18
0343958364
(1985)
Appl. Phys. Lett.
, vol.46
, pp. 784
Fahey, P.
1
Barbuscia, G.
2
Moslehi, M.
3
Dutton, R.W.
4
* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.
