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Journal of Applied Physics
Volumn 71, Issue 6, 1992, Pages 2596-2601
Structural and electrical damage induced by high-energy heavy ions in SiO2/Si structures
(5)
Busch, M C
a
Slaoui, A
a
Siffert, P
a
Dooryhee, E
b
Toulemonde, M
b
a
Faculté de Médecine
(
France
)
b
Centre Interdisciplinaire de Recherche Ions Lasers
(
France
)
Author keywords
[No Author keywords available]
Indexed keywords
EID
:
21544450054
PISSN
:
00218979
EISSN
:
None
Source Type
:
Journal
DOI
:
10.1063/1.351078
Document Type
:
Article
Times cited : (
52
)
References (
42
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