Point defect structures and energetics in Si using an empirical potential

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 11, Issue 1, 1993, Pages 224-230

  Takai, T ^a   Halicioglu, T ^a   Tiller, W A ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIVACANCIES; EMPIRICAL POTENTIALS; FRENKEL DEFECTS; MIGRATION ENERGY; SELF-INTERSTITIAL; SITE-SHARING; STRUCTURAL VARIATIONS;

POTENTIAL ENERGY FUNCTIONS;

POINT DEFECTS;

EID: 21544444378     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.578707     Document Type: Article

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