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Applied Physics Letters

Volumn 54, Issue 16, 1989, Pages 1516-1518

Plastic flow during thermal oxidation of silicon

(3) Rafferty, C S a Borucki, L b Dutton, R W a

a STANFORD UNIVERSITY (United States)

b IBM (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21544441276 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.101384 Document Type: Article

Times cited : (44)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.