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Journal of Applied Physics

Volumn 67, Issue 5, 1990, Pages 2320-2332

Electrical activity and structural evolution correlations in laser and thermally annealed As-implanted Si specimens

(8) Parisini, A a Bourret, A b Armigliato, A a Servidori, M a Solmi, S a Fabbri, R a Regnard, J R b Allain, J L b

a CNR (Italy)

b CEA GRENOBLE (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21544432910 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.345527 Document Type: Article

Times cited : (58)

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