Micro channel fabrication in PMMA substrates using CO2 laser and sacrificial mask process

Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004

Volumn , Issue , 2004, Pages 116-121

  Shi, Guangyi ^a   Huang, Qiang ^a   Li, Wen J ^b   Huang, Wenqian ^a   Ren, Yanyun ^a   Li, Jun ^a   Li, Kejie ^a  

^a BEIJING INSTITUTE OF TECHNOLOGY   (China)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE LASERS; LASER BEAMS; MASKS; MICROBIOLOGY; MICROELECTROMECHANICAL DEVICES; PERSONAL COMPUTERS; Q SWITCHING; ULTRAVIOLET RADIATION;

HOT EMBOSSING; MICRO CHANNEL FABRICATION; SACRIFICIAL MASK PROCESSES; SHORT WAVELENGTHS;

POLYMETHYL METHACRYLATES;

EID: 21444460011     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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