Preparation of nanoporous silica film and research on its optical properties

Gaojishu Tongxin/Chinese High Technology Letters

Volumn 15, Issue 6, 2005, Pages 55-57

  Wang, Juan ^a   Zhang, Changrui ^a   Feng, Jian ^a  

^a NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY   (China)

Author keywords

Low k; Nanoporous silica film; Optical property; Sol gel; Spectroscopic ellipsometry

Indexed keywords

EID: 21444455996     PISSN: 10020470     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)