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Volumn , Issue , 2004, Pages 278-281
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A MEMS sensor array for explosive particle detection
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Author keywords
Explosive particle detection; MEMS; Silicon beam
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Indexed keywords
ARRAYS;
CANTILEVER BEAMS;
ELECTRIC POTENTIAL;
ELEMENTARY PARTICLES;
MICROELECTROMECHANICAL DEVICES;
SENSORS;
SILICON;
TEMPERATURE DISTRIBUTION;
TOLUENE;
EXPLOSIVE PARTICLE DETECTION;
MEMS;
SILICON BEAMS;
TRINITROTOLUENE (TNT);
EXPLOSIVES;
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EID: 21444443177
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (8)
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References (4)
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